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當(dāng)前位置:> 供求商機(jī)> E27B,E28B,E29B-電容壓力計(jì)
For certain semiconductor and industrial manufacturing processes, heating the Baratron to 1000C is sometimes not enough to prevent deposition of process byproducts that cause drift in the manometer's output and undesirable process excursions. For these difficult processes, MKS offers a heated capacitance manometer with a patented etch baffle in its sensor, which forces condensable process byproducts to deposit on a baffle before reaching the sensor's diaphragm measurement element. This greatly reduces the amount of zero drift in the Baratron, which in turn improves the overall Cost of Ownership and process accuracy. These products are available in full-scale measurement ranges as low as 0.02 Torr (0.27 mbar), and with either 15-pin D-sub-miniature (Types E27B and E28B) or 9-pin D-subminiature (Type E29B) electrical connectors.
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