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通過實(shí)施光學(xué)條紋噪聲抑制方法的激光波長調(diào)制光譜技術(shù)實(shí)現(xiàn)氣體測量的高精度和高靈敏度檢測

閱讀：1106 發(fā)布時(shí)間：2023/6/26

　　近日，來自安徽理工大學(xué)、安徽皖西學(xué)院、復(fù)旦大學(xué)大氣與海洋科學(xué)學(xué)院、上海期智研究院的聯(lián)合研究團(tuán)隊(duì)發(fā)表了《通過實(shí)施光學(xué)條紋噪聲抑制方法的激光波長調(diào)制光譜技術(shù)實(shí)現(xiàn)氣體測量的高精度和高靈敏度檢測》論文。

　　Recently, the joint research team from Anhui University of Science and Technology, West Anhui University, Department of Atmospheric and Oceanic Sciences, Fudan University, Shanghai QiZhi Institute published an academic papers High precision and sensitivity detection of gas measurement by laser wavelength modulation spectroscopy implementing an optical fringe noise suppression method.

　　可調(diào)諧二極管激光吸收光譜(TDLAS)已被開發(fā)用于痕量氣體測量，因其高精度、高靈敏度和無需任何樣品準(zhǔn)備的原位自校準(zhǔn)的獨(dú)1特優(yōu)勢。通常，長光程的多次通過腔體(MPC)被應(yīng)用于增強(qiáng)基于TDLAS的傳感器的檢測精度和靈敏度。然而，MPC中出現(xiàn)的意外光學(xué)干涉紋嚴(yán)重影響了傳感器的檢測精度和靈敏度?；贛PC的TDLAS傳感器的檢測精度和靈敏度通常受到光學(xué)干涉紋的限制，這些干涉紋由衍射、鏡面表面瑕疵的散射、鏡面畸變、熱膨脹、冷收縮或應(yīng)力變形引起。因此，MPC中觀察到的光學(xué)干涉紋由不同的光學(xué)干涉紋組成。這些光學(xué)干涉紋主要是由于少量的激光以與主激光束相差ΔL的光程到達(dá)探測器所致。這些問題對于TDLAS是普遍存在的，尤其是在使用密集重疊斑點(diǎn)模式的MPC時(shí)，提出了一些不同的方法來消除光學(xué)干涉紋的負(fù)面影響。

　　The Tunable Diode Laser Absorption Spectroscopy (TDLAS) has been developed for trace gas measurement, as its unique advantages of high precision, high sensitivity and self-calibration in situ qualification with-out any sample preparation. The multi-pass cell (MPC) with a long optical path is usually applied to enhance TDLAS-based sensor’s detection precision and sensitivity. However, the unexpected optical fringes occurring in the MPC often spoil the sensor’s detection precision and sensitivity seriously. The detection precision and sensitivity of the TDLAS-based sensors containing an MPC are often limited by the optical fringes that result from diffraction, scattering on the mirror surface imperfections, mirror aberration, thermal expansion, cold contraction, or stress deformation. Therefore, the complex optical fringe consisting of different optical fringe will be observed in the MPC. These optical fringes are due largely to a small amount of laser reaching the detector with an optical path length differing by ΔL from the main laser beam. Those problems are common for TDLAS, especially using dense overlapped spot pattern MPC and some di?erent methods are proposed to eliminate the negative influence of the optical fringes.

　　研究團(tuán)隊(duì)提出了一種抑制可調(diào)二極管激光吸收光譜中光學(xué)條紋噪聲的新方法，并將其應(yīng)用于由光學(xué)條紋擾動(dòng)的CH4氣體傳感器，以提高檢測精度和靈敏度。

　　In this work, a novel method to suppress optical fringe noise in the tunable diode laser absorption spectroscopy is proposed and applied to the CH4 gas sensor perturbed by optical fringes for higher detection precision and sensitivity.

　　所開發(fā)的CH4檢測儀的示意圖如圖1所示。寧波海爾欣光電科技有限公司為此項(xiàng)目提供鎖相放大器(HPLIA 微型雙通道調(diào)制解調(diào)鎖相放大器)，從光電探測器輸出的信號(hào)發(fā)送到鎖相放大器，鎖相放大器相對于同步信號(hào)對2f模式進(jìn)行解調(diào)，鎖相放大器的時(shí)間常數(shù)設(shè)為1ms。

　　The schematic diagram of the developed CH4 detection instrument is shown in Fig. 1 . HealthyPhoton Co.,Ltd provided a HPLIA Miniature dual-channel modulated demodulation lock-in amplifier for this project. The lock-in amplifier demodulates the signal in the 2f mode with respect to the sync signal. The time constant of the lock-in amplifier is set to 1 ms.

　　Fig.1. Schematic diagram of the developed CH 4 detection system

　　lock-in amplifier (Healthy Photon, HPLIA)

　　對于被光學(xué)條紋和隨機(jī)噪聲干擾的20 ppm CH4的二次諧波(2 f)信號(hào)，通過該新方法，2f信號(hào)的信噪比(SNR)從17提高到182，優(yōu)化平均光譜范圍Δ???。與未經(jīng)處理的原始信號(hào)相比，CH4測量精度改善了約1.5倍。相應(yīng)的最小可檢測濃度可從3 ppb改善到0.78 ppb。系統(tǒng)的相應(yīng)噪聲當(dāng)量吸收靈敏度(NNEA)和噪聲當(dāng)量濃度(NEC)分別為6.13 ×10-11 cm−1 W Hz−1/2 and 0.181 ppm。

　　For the 2nd harmonic(2f) signal of 20 ppm CH4 spoiled by optical fringes and random noise, by the novel method, the signal-to-noise ratio (SNR) of the 2f signal is improved about 6.5 times from 17 to 182 with an optimal averaging spectral range Δ???. A ∼1.5 times improvement in the measurement precision of CH4 is achieved compared to unprocessed raw signal. The corresponding minimum detectable concentration can be improved from 3 ppb down to 0.78 ppb. The corresponding noise equivalent absorption sensitivity (NNEA) and the noise equivalent concentration (NEC) of the system is 6.13 ×10-11cmW-1Hz-1/2 and 0.181 ppm, respectively.