日本SMC真空組件 SMC真空組件是將各種真空元件組合起來(lái)的多功能元件。
SMC真空組件有四個(gè)系列：ZM、ZX、ZR、ZL。
ZX、ZR系列
日本SMC真空發(fā)生器ZM、ZMA、ZH、ZU、ZL、ZYY、ZYX、ZQ
日本SMC真空過(guò)濾器ZFA、ZFB、ZFC、
日本SMC真空吸盤(pán)ZP、ZPT、ZPX、ZPR
日本SMC真空用自由安裝型氣缸ZCUK系列

SMC真空組件是將各種真空元件組合起來(lái)的多功能元件。

SMC真空組件有四個(gè)系列：ZM、ZX、ZR、ZL。
日本SMC真空組件ZX、ZR系列
日本SMC真空發(fā)生器ZM、ZMA、ZH、ZU、ZL、ZYY、ZYX、ZQ
日本SMC真空過(guò)濾器ZFA、ZFB、ZFC、
日本SMC真空吸盤(pán)ZP、ZPT、ZPX、ZPR
日本SMC真空用自由安裝型氣缸ZCUK系列
日本SMC真空用分水過(guò)濾器AMJ系列

ZM051AH-B5LNB ZR100-C15LZ-F ZM102H-M15 ZX100-J15LZB-D21C
ZM051AH-K5LZ-E15 ZR100-C35MZ-F ZM102H-X10 ZX100-J15LZB-EC
ZM051H-J5GB ZR100-K15G-D125 ZM102H-X111 ZX100-J15LZ-F
ZM051H-J5LB-M21 ZR100-K15G-D126 ZM102M-E15L ZX100-J3-PS
ZM051H-J5LZ ZR100-K15GS-F ZM102SH ZX100-K13LZ-EC
ZM051H-J5LZB ZR100-K15LZ-ECL ZM103AH-K5LZ-E15 ZX100-K15G-PS
ZM051H-K5GB ZR100-K15MOZB-F ZM103AH-K5LZ-E15CL ZX100-K15GS-F
ZM051H-K5GB-E15 ZR100-K15MOZ-F ZM103AH-K5LZ-E15L ZX100-K15GZ
ZM051H-K5LB ZR100-K15MZB-E ZM103AH-K5LZ-E16C ZX100-K15LB-PS
ZM051H-K5LB-E15 ZR100-K15MZB-F ZM103H-B5G-E14L-X107 ZX100-K15L-F
ZM051H-K5LB-E15C ZR100-K15MZ-E ZM103H-B5LZ ZX100-K15L-F-X102
ZM051H-K5LB-M21 ZR100-K15MZ-EC ZM103HF-K5LZ-E17 ZX100-K15LO-F
ZM051H-K5LZ ZR100-K25G-D125 ZM103H-J5LB-E15 ZX100-K15LOZB-PBCL
ZM051H-K5LZB ZR100-K25G-D126 ZM103H-J5LOZ-X111 ZX100-K15LOZ-F
ZM051H-K5LZB-E15 ZR100-K25LZB-EL ZM103H-J5LZB ZX100-K15L-PS
ZM051H-K5LZ-E15 ZR100-K25LZ-E ZM103H-K51LZ-E15L ZX100-K15LZ
ZM051H-Q5 ZR100-K25LZ-EC ZM103H-K5GB ZX100-K15LZB
ZM051HT-K5LZ ZR100-K25LZ-ECL ZM103H-K5GB-E15 ZX100-K15LZB-D21CL
ZM051SAH-K5G-M15L ZR100-K25LZ-EL ZM103H-K5GB-X143 ZX100-K15LZB-D21C-Y
ZM051SH-K5G ZR100-K25LZ-F ZM103H-K5G-E15L ZX100-K15LZB-D21L
ZM051SH-K5GB-E15 ZR110L1-K15GB-EC ZM103H-K5G-M21 ZX100-K15LZB-D21L-X142
ZM051SH-K5G-E14L ZR110L1-K25LB-EC ZM103H-K5LB-E15 ZX100-K15LZB-DP23
ZM052H ZR110L1-K25LZ-EC ZM103H-K5LOZB-X143 ZX100-K15LZB-DP24
ZM053AH-B5LNZB-X107 ZR110L1-K25MB-EC ZM103H-K5LOZ-E14L ZX100-K15LZB-EC
ZM053H-B5LNB ZR110L1-K25MZB-EC ZM103H-K5LOZ-X107 ZX100-K15LZB-F
ZM053H-B5LZB ZR110S1-K15LZB-EC ZM103H-K5LOZ-X111 ZX100-K15LZ-D21C
ZM053H-J5GB ZR110S1-K15MNZ-E ZM103H-K5LZ ZX100-K15LZ-E
ZM053H-J5GB-E15 ZR110S1-K15MZ-E ZM103H-K5LZB ZX100-K15LZ-EC
ZM053H-J5LOZ-X107 ZR110S1-K25GB-EL ZM103H-K5LZB-E14C ZX100-K15LZ-ECL
ZM053H-J5LZB ZR110S1-K25G-D126 ZM103H-K5LZB-E15 ZX100-K15LZ-F
ZM053H-K5GB-E15 ZR110S1-K25LZB-EC ZM103H-K5LZB-E55L ZX100-K15LZ-F-X102
ZM053H-K5G-E15L-X107 ZR110S1-K25LZ-F ZM103H-K5LZB-X143 ZX100-K15LZ-PS
ZM053H-K5LB ZR110S2-K25MZB-F ZM103H-K5LZ-E15 ZX100-K16G-F
ZM053H-K5LNB ZR110S3-K25LZB-E ZM103H-K5LZ-E15L ZX100-K1Y5LZ-ECL
ZM053H-K5LZ ZR110S3-K25LZB-F ZM103H-K5LZ-E16C ZX100-K1Y5LZ-F
ZM053H-K5LZB ZR113S1-K15LOZB-ECL ZM103H-K5LZ-M21 ZX100-K25LZ-EC
ZM053H-K5LZB-E15 ZR113S1-K15MZ-EC ZM103H-KSLZB-E15 ZX100-K35L-F-X117
ZM053H-K5LZB-E15CL ZR113S1-K1D2L-F ZM103M-J5LNZ-X135 ZX100-K35LOZ
ZM053H-KY5LZB-E14C ZR113S1-K25G-D126 ZM103M-K5LZB-X143 ZX100-K35LOZ-F
ZM054H ZR113S1-K2Y5MZ-D125L ZM103M-K5LZ-E55L ZX100-K35LZ
ZM056H ZR113S1-K2Y5MZ-D125L-M ZM103M-Q5-X107 ZX100-K35LZB-F
ZM070H-0 ZR113S2-K15MZ ZM104AH ZX100-K35LZB-F-X117
ZM071AH-K5LZ-E15 ZR113S3-K25MZ-EC ZM104H ZX100-K35LZ-E
ZM071HF-J5LZ-E15CN ZR115L1-K15GB-E ZM104M ZX100-K35LZ-E-X117
ZM071HF-K5LOZ-E55CL ZR115L1-K15GB-EL ZM105AH-K5LN ZX100-K35LZ-F
ZM071H-J1LZB ZR115L1-K25GB-F ZM105AH-K5LZ ZX100-K35LZ-F-X117
ZM071H-J5GB ZR115S1-C1Y5LZ-F ZM105AH-K5LZ-E16C ZX100-K35LZ-F-X139
ZM071H-J5GB-E15 ZR115S1-C2 ZM105H-B5LZ ZX100-K35LZ-X139
ZM071H-J5LB ZR115S1-K15GB-E ZM106AH ZX100-K35MOZ
ZM071H-J5LZB ZR115S1-K15GB-EC ZM121H-J5LZ ZX100-K35MZ-EC
ZM071H-J5LZB-E15 ZR115S1-K15LB-EC ZM121H-K5LB-E15 ZX100-K35MZ-F
ZM071H-J5LZ-E15 ZR115S1-K15LOZB-ECL ZM121H-K5LZ ZX100-K3Y5LZ-F
ZM071H-K1LZ ZR115S1-K15LZB ZM121H-K5LZ-E15L ZX100-K55G-PS
ZM071H-K1LZB ZR115S1-K15LZB-EC ZM121HT-K5LZ-E15 ZX100-K55H-PS
ZM071H-K1LZB-E14C ZR115S1-K15LZB-EL ZM121HT-K5LZ-E15L ZX100-K55L-PS
ZM071H-K5G ZR115S1-K15LZB-F ZM121HT-K5LZ-M21L ZX100-K55LZ-PS
日本SMC真空組件 SMC ZL系列為三級(jí)抽吸的真空發(fā)生器組件，帶真空過(guò)濾器及消音器，還有帶真空計(jì)或真空壓力開(kāi)關(guān)、供給閥、破壞閥的形式。噴嘴直徑為1.2mm。當(dāng)供給壓力為0.4MPa時(shí)，極限真空度為84kPa，***大吸入流量為100/min(ANR)。新型ZL212系列的3段接收管由上下兩個(gè)重疊成一體，***大吸入流量可達(dá)200/min(ANR)。
ZM071H-K5GB ZR115S1-K15LZ-E ZM122H ZX100-Q15L0
ZM071H-K5GB-E15 ZR115S1-K15MZB-EC ZM130H-0 ZX100-Q15L-DP23C
ZM071H-K5GB-E15L ZR115S1-K15MZB-EL ZM131H-B1LZ-E15L ZX100-Q15L-F
ZM071H-K5G-E15 ZR115S1-K15MZ-EC ZM131H-B5LZ-E15L ZX100-Q15LO-F
ZM071H-K5L ZR115S1-K25GB ZM131H-B5LZ-E15L-X235 ZX100-Q45MO-PBC-X125
ZM071H-K5LB ZR115S1-K25GB-E ZM131HF-J5LZ ZX100-U15LZB-F-X110
ZM071H-K5LB-E15 ZR115S1-K25G-D126 ZM131HF-K5LOZ-E55CL ZX1051-EC
ZM071H-K5LB-M21 ZR115S1-K25LZB-EC ZM131HF-K5LOZ-E55CL-Q ZX1051-F
ZM071H-K5LZ ZR115S1-K25LZB-F ZM131HF-K5LOZ-E55L ZX1051-J15G
ZM071H-K5LZB ZR115S1-K25LZ-E ZM131HF-K5LZ ZX1051-J15GB
ZM071H-K5LZB-E15 ZR115S2-K15GZB-F ZM131HF-K5LZ-E15 ZX1051-J15HZ-PS
ZM071H-K5LZB-M21 ZR115S2-K15LZ-EC ZM131HF-K5LZ-E15L ZX1051-J15LZ-PB
ZM071H-K5LZ-E14C ZR115S2-K15MZ ZM131HF-K5LZ-E55L ZX1051-J3-PS
ZM071H-K5LZ-E14L ZR115S2-K15MZB-F ZM131HF-K5LZ-M21 ZX1051-K11L-PS
ZM071H-K5LZ-E15 ZR115S2-K25GZB-F ZM131H-J5G ZX1051-K15GB-E
ZM071H-K5LZ-E15L ZR115S3-C15MZ-E ZM131H-J5GB ZX1051-K15GB-EC
ZM071M-K1LZ-E17 ZR115S3-K15GB-EL ZM131H-J5GB-E15 ZX1051-K15GB-PS
ZM071M-K5GB-E15 ZR115S3-K35GB-EL ZM131H-J5GB-M21 ZX1051-K15G-PS
ZM071M-K5LZ ZR118S1-C15GB-F ZM131H-J5L ZX1051-K15H-PS
ZM071M-K5LZB ZR118S1-K15GB-EC ZM131H-J5LB-E15 ZX1051-K15L
ZM071M-K5LZ-E14CN ZR118S1-K15LB-EL ZM131H-J5L-E15L ZX1051-K15LB-EC
ZM071M-K5LZ-X126 ZR118S1-K15LZB-EC ZM131H-J5LOZ-E55CL ZX1051-K15LB-PS
ZM071MT-B5LZ-E15C ZR118S1-K1D2MOZ ZM131H-J5LOZ-X111 ZX1051-K15LN-F
ZM071MT-K5LZ ZR118S1-K25GB ZM131H-J5LZ ZX1051-K15LNZ
ZM071SAH-K5L ZR118S1-K25GB-F ZM131H-J5LZB ZX1051-K15LOZ-ECN
ZM071SAH-K5LO-E15L ZR118S1-K25G-D126 ZM131H-J5LZB-E15 ZX1051-K15L-PS
ZM071SAH-K5LZB ZR118S1-K25LZB-F ZM131H-J5LZB-M21L ZX1051-K15LZ
ZM071SAH-K5LZ-E14 ZR120L1-C15GB ZM131H-J5LZ-E15 ZX1051-K15LZB
ZM071SAH-K5LZ-E14L ZR120L1-K15GB-EL ZM131H-J5LZ-E18 ZX1051-K15LZB-E
ZM071SH-K1LZ ZR120L1-K15GS-EC ZM131H-K1LZ-E15 ZX1051-K15LZB-EC
ZM071SH-K5GB-E15 ZR120L1-K15MZ-EC ZM131H-K3LZ ZX1051-K15LZB-PS
ZM071SH-K5LZ ZR120L1-K25GB-EL ZM131H-K5G ZX1051-K15LZ-D21C
ZM071SH-K5LZB ZR120L1-K25L-ECN ZM131H-K5GB ZX1051-K15LZ-E
ZM071SH-K5LZ-E15 ZR120L1-K25MZ-EC ZM131H-K5GB-E15 ZX1051-K15LZ-EC
ZM071SH-K5LZ-E15L ZR120L2-J25LZ-F ZM131H-K5GB-M21L ZX1051-K15LZ-PS
ZM071SM-K5L ZR120L2-K15LZ-F ZM131H-K5G-E15 ZX1051-K15LZ-PSL
ZM072H ZR120S1-C15G-EC ZM131H-K5G-E15L ZX1051-K16LZB-EC
ZM072H-E15L ZR120S1-C15MZ ZM131H-K5G-X126 ZX1051-K16LZ-PS
ZM072H-M21L ZR120S1-C35MZ ZM131H-K5L ZX1051-K35LOZ-ECN
ZM072SH-E14 ZR120S1-C35MZ-E ZM131H-K5LB ZX1051-K35LZ-D21C
ZM073AH-K5LZB ZR120S1-EC ZM131H-K5LB-E15 ZX1051-K35LZ-EC
ZM073AH-K5LZB-E15 ZR120S1-ECL ZM131H-K5LB-X111 ZX1051-K35LZ-PS
ZM073AH-K5LZB-X163 ZR120S1-F ZM131H-K5L-E55 ZX1051-K35M0ZB-D21CN
ZM073AH-K5LZ-E15 ZR120S1-K15G ZM131H-K5LNZ-E15 ZX1051-K35MOZB-D21CN
ZM073AM-KY5LOZ-X107 ZR120S1-K15GB-E ZM131H-K5LOZ ZX1051-K35MOZ-ECN-X139
ZM073H-A5LZ ZR120S1-K15GB-EC ZM131H-K5LOZ-E15 ZX1051-K35MZ-EC
ZM073HF-J5LOZ-E55CL ZR120S1-K15GB-F ZM131H-K5LZ ZX1051-K3Y5MOZ-DP23CN
ZM073HF-K5LOZ ZR120S1-K15LB ZM131H-K5LZB ZX1051-K55G-PS
ZM073HF-K5LOZ-E15 ZR120S1-K15LOZB-F ZM131H-K5LZB-E15 ZX1051-K55H-PS
ZM073HF-K5LOZ-E55CL ZR120S1-K15LOZ-EC ZM131H-K5LZB-E15L ZX1051-K55L-PS
ZM073HF-K5LZ ZR120S1-K15LZB ZM131H-K5LZB-M21L ZX1051-K55LZ-PS
ZM073H-J3L ZR120S1-K15LZB-E ZM131H-K5LZ-E14 ZX1051-K6
ZM073H-J5LZ ZR120S1-K15LZB-EC ZM131H-K5LZ-E14CL ZX1051-PS
ZM073H-J5LZB ZR120S1-K15LZB-EL ZM131H-K5LZ-E14L ZX1051-Q15MO-D23CN-X313
ZM073H-J5LZ-E15 ZR120S1-K15LZB-F ZM131H-K5LZ-E15 ZX1051-Q45MO-D21C-X286
ZM073H-K5G ZR120S1-K15LZ-E ZM131H-K5LZ-E15CL ZX1052-F
ZM073H-K5GB ZR120S1-K15LZ-ECL ZM131H-K5LZ-E15L ZX1052-J15LOZ
ZM073H-K5G-E15 ZR120S1-K15LZ-F ZM131H-K5LZ-E15-X126 ZX1052-J15LZ
ZM073H-K5LB-E15 ZR120S1-K15MOZ ZM131H-K5LZ-E16 ZX1052-J15LZ-PS
ZM073H-K5LB-M21 ZR120S1-K15MZB-EC ZM131H-K5LZ-E16CL ZX1052-J3-PS
ZM073H-K5LZ ZR120S1-K15MZ-E ZM131H-K5LZ-E55CL ZX1052-K15H-F
ZM073H-K5LZB ZR120S1-K15MZ-EC ZM131H-K5LZ-M15 ZX1052-K15LOZ
ZM073H-K5LZB-E14C ZR120S1-K15MZ-F ZM131H-K5LZ-X111 ZX1052-K15LZ
ZM073H-K5LZB-E15 ZR120S1-K1D2LB-EC ZM131H-KSL-E15L ZX1052-K15LZ-E
ZM073H-K5LZB-E15CL ZR120S1-K1Y5LZ-D125-M ZM131H-KY5LZ ZX1052-K15LZ-F
ZM073H-K5LZ-E15 ZR120S1-K25GB ZM131H-KY5LZB-X111 ZX1052-K15LZ-PS
ZM073H-K5LZ-E15L ZR120S1-K25GB-EC ZM131H-KY5LZ-X111 ZX1052-K35LZ-PS
ZM073H-Q5 ZR120S1-K25GB-EL ZM131H-Q5 ZX1052-K55G-PS
ZM073M-K1LZ-M21 ZR120S1-K25G-D126 ZM131H-Q5-E14L ZX1052-K55H-PS
ZM073M-K5GB-E15 ZR120S1-K25G-E ZM131H-Q5-E15L ZX1052-K55L-PS
ZM073M-K5G-X126 ZR120S1-K25GZ-EL ZM131HT-J5LOZ-E55CL ZX1052-K55LZ-PS
ZM073M-K5LZ ZR120S1-K25LB-E ZM131H-WG15K067 ZX1053-J3-PS
ZM073M-K5LZ-X126 ZR120S1-K25LB-EC ZM131M-B1LZ ZX1053-K15LZ-EC
ZM074HF-E15CL ZR120S1-K25L-EL ZM131M-J5LZ ZX1053-K15LZ-PS
ZM075SH-K5LZB-E14 ZR120S1-K25LZB-D225L ZM131M-J5LZ-E15 ZX1053-K35LZ-E55C
ZM101AH-K5LZ ZR120S1-K25LZB-E ZM131M-K5LZB ZX1053-K35LZ-PS
ZM101H-A5G-E15 ZR120S1-K25LZB-EC ZM131M-K5LZB-E17L ZX1053-K55G-PS
ZM101H-B3LZ-E15CN ZR120S1-K25LZ-E ZM131M-K5LZ-E17L ZX1053-K55H-PS
ZM101H-B3LZ-M21C ZR120S1-K25LZ-F ZM131M-K5LZ-X111 ZX1053-K55L-PS
SMC ZR系列為大型真空發(fā)生器組件，有多種組合方式。特別適合搬運(yùn)0.5~5Kg的電子零件和精密零件，系模塊式組合。噴嘴直徑從ф1到ф2.標(biāo)準(zhǔn)型極限真空度為84kPa，極限吸入流量為22~84L/min(ANR)。大流量型極限真空度為53kPa，極限吸入流量為42~105L/min(ANR)。供給閥和破壞閥也有多種組合形式供選用。

ZM101H-B3LZ-M21L ZR120S1-K25M-EC ZM131SAH-K5LZB-E14C ZX1053-K55LZ-PS
ZM101H-B5G-E14L ZR120S1-K25MOZ ZM131SAH-K5LZ-E15L ZX1071-EC
ZM101H-B5LZB-E15L ZR120S1-K25MZ ZM131SAH-KY5LZB-E15C ZX1071-J15L-F
ZM101H-B5LZ-E14L ZR120S2-K25GB-E ZM131SHF-K5LZ ZX1071-J15LOZ-E
ZM101HF-J5LOZ-E55L ZR120S2-K25LB-EC ZM131SH-J3L ZX1071-J15LZ-E
ZM101HF-J5LZ-E55L ZR120S2-K3-F ZM131SH-J5LZ ZX1071-J15LZ-EC
ZM101H-J5G ZR120S3-K15GB-EC ZM131SH-JY5LZB-E15L ZX1071-J15LZ-F
ZM101H-J5GB ZR120S3-K15GB-EL ZM131SH-K3LZ-M21L ZX1071-J15LZ-PS
ZM101H-J5GB-M15 ZR120S3-K1SLOZB-EC ZM131SH-K5LO-E15 ZX1071-J3-PS
ZM101H-J5GB-M21 ZR120S3-K25GB-E ZM131SH-K5LZ ZX1071-K11LZ-PS
ZM101H-J5L ZR120S3-K25LZB-EC ZM131SH-K5LZB ZX1071-K13LZB-F
ZM101H-J5LB ZR1-VJ3233-5GS-X17 ZM131SH-K5LZ-E15 ZX1071-K15GB-E
ZM101H-J5LB-E15 ZR1-VJ3233-5LZB-X17 ZM131SH-K5LZ-E15-X220 ZX1071-K15GB-EC
ZM101H-J5L-E16C ZR1-VJ3233-5MDZ-X17 ZM131SM-J5LZ ZX1071-K15GB-PS
ZM101H-J5LOZ-X111 ZR1-VJ3233-5MOZ-X17 ZM131SM-J5LZB ZX1071-K15G-PS
ZM101H-J5LZ ZR1-VJ3233-5MZB-X17 ZM131SM-K5L-E15CL ZX1071-K15LB-EC
ZM101H-J5LZB ZR1-VJ3233-5MZ-X17 ZM132H ZX1071-K15L-EC
ZM101H-J5LZB-E15 ZR1-VK15GS ZM132H-E14 ZX1071-K15LOZ-ECL
ZM101H-K3LZ-E15C ZR1-VK15LZB ZM132H-E15 ZX1071-K15LOZ-ECN
ZM101H-K5GB ZR1-VK25LZ ZM132M ZX1071-K15L-PS
ZM101H-K5GB-E14 ZR1-VK2Y5GZ ZM132SM ZX1071-K15LZ
ZM101H-K5GB-E15 ZR1-W10L1 ZM133AH-J5LZ ZX1071-K15LZB
ZM101H-K5GB-E15L ZR1-W15L1 ZM133H-J5LZ ZX1071-K15LZB-E
ZM101H-K5GB-M15 ZR1-W15S1 ZM133H-J5LZB ZX1071-K15LZB-EC
ZM101H-K5GB-M21 ZR1-W18S1 ZM133H-K1LZ-E14CL ZX1071-K15LZB-F
ZM101H-K5G-E14L ZR1-W18S2 ZM133H-K3LZ-E16L ZX1071-K15LZB-PS
ZM101H-K5G-E15 ZR1-W20L1 ZM133H-K5GB ZX1071-K15LZ-D21
ZM101H-K5G-M15 ZR1-W20S1 ZM133H-K5GB-E15 ZX1071-K15LZ-D21C
ZM101H-K5L ZR1-W20S2 ZM133H-K5G-E15L ZX1071-K15LZ-D21CL
ZM101H-K5LB ZR1-WD20S1 ZM133H-K5LB-E15C ZX1071-K15LZ-D22
ZM101H-K5LB-E15 ZR-RV1 ZM133H-K5LZ ZX1071-K15LZ-E
ZM101H-K5LB-E15L ZL112 ZM133H-K5LZB ZX1071-K15LZ-E55C
ZM101H-K5L-E14 ZL112-E25 ZM133H-K5LZB-E14C ZX1071-K15LZ-EC
ZM101H-K5L-M15 ZL112-E25L ZM133H-K5LZB-E14C-X107 ZX1071-K15LZ-F
ZM101H-K5LO-X225 ZL112-E25L-M ZM133H-K5LZB-E15 ZX1071-K15LZ-PS
ZM101H-K5LOZ-X111 ZL112-E26 ZM133H-K5LZ-E15 ZX1071-K15MZ-F
ZM101H-K5L-X225 ZL112-E65 ZM133H-K5LZ-X198 ZX1071-K16LZB
ZM101H-K5LZ ZL112-E65L ZM133H-Q5 ZX1071-K16LZB-EC
ZM101H-K5LZB ZL112-E65L-M ZM133M-J5LZB ZX1071-K16LZ-F
ZM101H-K5LZB-E14C ZL112-G ZM133M-J5LZB-E14 ZX1071-K1Y5LZ-DP23C-X121
ZM101H-K5LZB-E15 ZL112-GN ZM133M-K5LZB ZX1071-K35LOZB
ZM101H-K5LZB-E15CL ZL112-K13MZ-E25 ZM133SH-K5LZ ZX1071-K35LOZB-F
ZM101H-K5LZB-E15L ZL112-K15G-E26 ZM133SH-K5LZ-E15L ZX1071-K35LZ-F
ZM101H-K5LZB-M21 ZL112-K15HZ-Q ZM134H ZX1071-K35LZ-PS
ZM101H-K5LZ-E14 ZL112-K15L-E25L ZM134H-E15L ZX1071-K55G-PS
ZM101H-K5LZ-E15 ZL112-K15LOZ-E26L ZM134M-E15CL ZX1071-K55H-PS
ZM101H-K5LZ-E15L ZL112-K15LZD-E25L ZM135M-K5LZ ZX1071-K55L-PS
ZM101H-K5LZ-E15-X126 ZL112-K15LZD-E65L ZM136H ZX1071-K55LZ-PS
ZM101H-K5LZ-E16C ZL112-K15LZ-E25 ZM136M-E15CL ZX1071-PS
ZM101H-K5LZ-E19 ZL112-K15LZ-E25L ZM150S-0 ZX1071-Q15L-D21-X121
ZM101H-KY5G ZL112-K15M-E25L-M ZM151H-K5LZ-E15L-X142 ZX1071-Q15M-DP21C-X410
ZM101H-Q5 ZL112-K15MOZ-E65L-Q ZM151S-K5LOZ ZX1071-Q15M-DP21L-X410
ZM101M-A5G ZL112-K15MOZ-EB65L ZMA101H-K5-T14C ZX1071-Q15MO-D21L-X121
ZM101M-A5G-E15 ZL112-K15MZ-E25 ZM-A13HNHRBN52HPH-DBH00002 ZX1071-Q35L-DP23C-X327
ZM101M-A5G-E15L ZL112-K15MZ-E25L ZM-A31HNHRBN52HPH-DBH00002 ZX1071-Q35M-PSE1-X255
ZM101M-A5G-E15-X247 ZL112-K15MZ-G ZX1073-PS ZX1071-Q45LB-D23C-X204
ZM101M-K1LZB ZL112-K15MZ-GN ZX1073-Q15L-DP23CL ZX1071-Q45L-D21CL-X462
ZM101M-K1LZ-E14 ZL112-K25G-E25 ZX1101-DP23C ZX1071-Q45LZB-D23C-X204
ZM101M-K5LB ZL112-K25LZ ZX1101-F ZX1072-J15LZ-PS
ZM101M-K5LZ ZL112-K25LZD-E25L ZX1101-J11LZ-PBC ZX1072-J3-PS
ZM101M-K5LZB ZL112-K25M-G ZX1101-J15G ZX1072-K15GB-E
ZM101M-K5LZB-E15CL ZL112-K25MZ ZX1101-J15GB-F ZX1072-K15LOZ
ZM101M-K5LZB-E15L ZL112-K25MZ-E25L ZX1101-J15G-F ZX1072-K15LZB-EC
ZM101M-K5LZ-E15 ZL112-K25MZ-G ZX1101-J15GS-F ZX1072-K15LZ-EC
ZM101M-K5LZ-E15L ZL112PF ZX1101-J15LB-F ZX1072-K55G-PS
ZM101M-K5LZ-X194 ZL112PF-G ZX1101-J15LZ ZX1072-K55H-PS
ZM101M-K5MZ-X201 ZL112-SP01 ZX1101-J15LZB-F ZX1072-K55L-PS
ZM101SAH-K5G-E15 ZL212 ZX1101-J15LZ-D21 ZX1072-K55LZ-PS
ZM101SAH-K5LZ ZL212-E25 ZX1101-J15LZ-EC ZX1073-J15LZ-PS
ZM101SH-A5LZ-E15 ZL212-E25L ZX1101-J15LZ-ECL ZX1073-J3-PS
SMC ZX系列真空組件采用了模塊式結(jié)構(gòu)，根據(jù)使用目的，可以自由組合成不同功能的真空組合元件。有真空發(fā)生器系統(tǒng)和真空泵系統(tǒng)兩類(lèi)組合。 SMC ZX系列真空組件的結(jié)構(gòu)緊湊、重量?。偨M合才120g），故可直接安裝在執(zhí)行元件上。特別適合于100G以下的電子元件、精密零件的搬運(yùn)、裝配和粘接。

ZM101SH-J5LZ ZL212-E26 ZX1101-J15LZ-F ZX1073-K15LZB-EC
ZM101SH-K5G ZL212-E26L ZX1101-J15LZ-F-X121 ZX1073-K15LZ-EC
ZM101SH-K5LZ ZL212-E65 ZX1101-J15LZ-PB ZX1073-K15LZ-PS
ZM101SH-K5LZB-E15 ZL212-E65L ZX1101-J15LZ-PBL ZX1073-K1Y5LZ-DP23C
ZM101SH-K5LZB-E18 ZL212-EE67L ZX1101-J15LZ-PBL-X121 ZX1073-K35LZB-D21C
ZM101SH-K5LZ-E15 ZL212-G ZX1101-J15LZ-PS ZX1073-K35LZB-D21C-X150
ZM101SM-A5G-E15 ZL212-GN ZX1101-K11LZ ZX1073-K35LZB-D23C-X150
ZM101SM-K1LZ-E14L ZL212-G-Q ZX1101-K11LZB-EC ZX1073-K35LZ-D22
ZM101SM-K5LZ ZL212P ZX1101-K11LZB-ECN ZX1073-K55G-PS
ZM102H ZL212P-GN ZX1101-K11LZ-EC ZX1073-K55H-PS
ZM102H-E14 ZL212-WD36J003 ZX1101-K11LZ-PS ZX1073-K55L-PS
ZM102H-E15 ZX1101-K15LZ-D23C ZX1101-K15GB ZX1073-K55LZ-PS
ZX1102-K15LZB-D21L ZX1101-K15LZ-E ZX1101-K15GB-E ZX1-VBK15LOZ
ZX1102-K15LZB-F ZX1101-K15LZ-E55CL ZX1101-K15GB-EC ZX1-VBK15LZ
ZX1102-K15LZ-E ZX1101-K15LZ-EC ZX1101-K15GB-PB ZX1-VBK15LZB
ZX1102-K15LZ-EC ZX1101-K15LZ-ECL ZX1101-K15G-F ZX1-VBK15LZB-D-M
ZX1102-K15LZ-ECL ZX1101-K15LZ-EL ZX1101-K15G-PBL ZX1-VBK15LZ-D-M
ZX1102-K15LZ-EL ZX1101-K15LZ-F ZX1101-K15GZ-E ZX1-VBK35LOZ
ZX1102-K15LZ-F ZX1101-K15LZ-F-X121 ZX1101-K15LB ZX1-VBK35LZ
ZX1102-K15LZ-F-X125 ZX1101-K15LZ-PB ZX1101-K15LB-E ZX1-VBK35LZ-D-S
ZX1102-K1SLZ-EC ZX1101-K15LZ-PBC ZX1101-K15LB-EC ZX1-VJ114-5LNZ
ZX1102-K35LNZ-F ZX1101-K15LZ-PS ZX1101-K15LB-F ZX1-VJ114-5LOZ
ZX1102-K35LZ-E55CL ZX1101-K1Y5LZ-D21C ZX1101-K15LN-F ZX1-VJ114-5LOZB
ZX1102-K35MZ-E ZX1101-K1Y5LZ-DP23C-X121 ZX1101-K15LNZB-PBC ZX1-VJ114-5LS
ZX1102-K53LZ-E55CL ZX1101-K1Y5LZ-ECL ZX1101-K15LOZ ZX1-VJ114-5LZ
ZX1102-Q15L-DP23CL ZX1101-K35LOZ-PSCL ZX1101-K15LOZB-D21CL ZX1-VJ114-5LZB
ZX1102-Q15LOZ-DP23CL ZX1101-K35LZB-ECL ZX1101-K15LOZ-E55CL ZX1-VJ114-5MNZ
ZX1102Q-K15LOZB-F ZX1101-K35LZ-EC ZX1101-K15LOZ-E55CN-X121 ZX1-VJ314-5LOZ
ZX1102Q-K15LOZ-DP23C ZX1101-K35LZ-ECL-X183 ZX1101-K15LOZ-ECN ZX1-VJ314-5LOZB
ZX1102Q-K15LZ-DP23C ZX1101-K35LZ-F ZX1101-K15LOZ-F-X121 ZX1-VJ314-5LZ
ZX1102Q-K15LZ-DP23CL ZX1101-K35LZ-PS ZX1101-K15LOZ-Q ZX1-VJ314-5LZB
ZX1103-K11LB-F ZX1101-K35MOZB-D21CN ZX1101-K15LOZ-X121-Q ZX1-VJ314-5MOZB
ZX1103-K15L-ECL ZX1101-K35MZ-ECL ZX1101-K15L-PB ZX1-VJ314-5MZ
ZX1103-K15LOZB-D21CL ZX1101-K3Y5LOZ-PBCL ZX1101-K15LZ ZX1-VJ314-6LZB
ZX1103-K15LOZ-ECN ZX1101-PBC ZX1101-K15LZB ZX1-VJ314MY-5LZ
ZX1103-K15LZ ZX1101-PS ZX1101-K15LZB-D21C ZX1-VJ314Y-5LZ
ZX1103-K15LZB-PBC ZX1101-Q15L-F ZX1101-K15LZB-D21L ZX1-VJ314Y-5LZB
ZX1103-K15LZ-E ZX1101-Q35L-F-X121 ZX1101-K15LZB-D21L-X121 ZX1-VJ314Y-5M
ZX1103-K15LZ-EC ZX1102-J15GB-E ZX1101-K15LZB-D23CL-X121 ZX1-VJ314Y-5MOZ
ZX1103-K15LZ-ECL ZX1102-J15LOZ ZX1101-K15LZB-D23L ZX1-VJ324-5LZ
ZX1103-K15LZ-EL ZX1102-J15LZ ZX1101-K15LZB-E ZX1-VJ324-5LZB
ZX1103-K15LZ-F ZX1102-J15LZB-F ZX1101-K15LZB-E55C ZX1-VJ324-5MOZB
ZX1103-K35LZ-E55CL ZX1102-K11LNZB-ECN ZX1101-K15LZB-EC ZX1-VJ324-5MZ
ZX1103-K35LZ-EC ZX1102-K15L ZX1101-K15LZB-ECL ZX1-VJ324M-5LOZB
ZX1103-K35MOZ-F ZX1102-K15LNZ-F ZX1101-K15LZB-F ZX1-VJ324M-5LZB
ZX1-F ZX1102-K15LOZ-DP23C ZX1101-K15LZB-PB ZX1-VJ324M-5M
ZX1-F-D ZX1102-K15LOZ-DP23CL ZX1101-K15LZB-PS ZX1-VJ324M-5MOZ
ZX1-FE ZX1102-K15LOZ-DP23L ZX1101-K15LZ-D21 ZX1-VJ324M-5MOZB
ZX1-HS1 ZX1102-K15LOZ-ECL ZX1101-K15LZ-D21CL ZX1-VJ324M-5MZ
ZX1-HS2-07 ZX1102-K15LZ ZX1101-K15LZ-D21C-X204 ZX1-VJ324MY-5LZ
ZX1-HS2-10 ZX1102-K15LZB-D21CL ZX1101-K15LZ-D21L ZX1-VZJ15LZB
ZX1-R1 ZX1-VAK35LZB ZX1-VAK15MZ ZX1-VAK15LOZ-D-S
ZX1-R16 ZX1-VAK35LZB-D-M ZX1-VAK16GB-D-S ZX1-VAK15LZ
ZX1-S1 ZX1-VAK35MOZ ZX1-VAK16LZB ZX1-VAK15LZB
ZX1-VAJ25MZ ZX1-VAK35MZ-D-S-X117 ZX1-VAK35LOZB ZX1-VAK15LZB-D-M
ZX1-VAJ25MZ-D-M ZX1-VBK15LB-D-M ZX1-VAK35LZ ZX1-VAK15LZ-D-S
ZX1-VAK15G ZX1-VBK15LNZ ZX1-VAK15LB-D-M ZX1-VAK15LB

SMC ZM系列真空組件采用一體化結(jié)構(gòu)，故結(jié)構(gòu)緊湊、薄（厚度僅為15.5mm）、輕（***多組合400g）。因配管、配線、指示及調(diào)整旋鈕等全裝在側(cè)面，故可以多個(gè)組件集裝在一起，便于維護(hù)。因?yàn)榘烧婵瞻l(fā)生器的接收管設(shè)計(jì)成前后兩個(gè)抽吸口，除保證***大真空度達(dá)84kPa外，***大吸入流量可增大40%。SMC ZM系列真空組件***多可集裝10個(gè)。供氣口有單獨(dú)供氣和集中供氣兩種，排氣口為集中排氣式。