目錄:上海西努光學(xué)科技有限公司>>自動(dòng)化設(shè)備>>WDI MMS>> LFOV DIC
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Differential Interference Contrast
The use of Differential Interference Contrast (DIC) with large format line scan sensors and high resolution optics enable semiconductor, FPD, electronics and other industries to quickly image subtle surface structures and details which are not normally visible. The ability to image and subsequently analyze these structures leads to greater manufacturing
efficiencies and production throughput.
Automated Focus and Illumination
The LFOV DIC microscope is able to incorporate any one of WDIs Autofocus Sensors and High Power LED illumination options to create a compley autonomous inspection system. The flexibility in autofocus and illumination allows the LFOV DIC to be used in a wide variety of manufacturing applications including semiconductor, FPD, OLED, packaging and photovoltaic and solar panel inspection.
Practical Design
To meet the requirements of in line manufacturing, the LFOV DIC microscope features rugged industrial components, a small
footprint and low weight. Its modular nature allows it to be compley upgradable, ensuring the best performance for all
current and future applications.
LARGE FIELD OF VIEW DIC MODULAR MICROSCOPE
| Objectives (Single Lens System)* | Magnification | 5X | 10X | 20X |
| Numerical Aperture | 0.15 | 0.3 | 0.45 | |
| Working Distance | 20mm | 11mm | 3.1mm | |
| Field of View | 26.5 | 26.5 | 26.5 | |
| DIC Optics | Polarizer | Integrated Fixed Polarizing Beam Splitter | ||
| Apodizing Filter | Integrated Fixed Apodizing Filter | |||
| Analyzer | Adjustable Dichroic Analyzer | |||
| DIC Prism | Adjustable DIC Prism | |||
| Motorized Z Actuator | Type | 1/32 Stepper Motor | ||
| Travel | 10mm (±5mm) | |||
| Maximum Resolution | 0.156μm/step | |||
| Maximum Speed | 10mm/sec | |||
| Maximum Acceleration | 100 mm/s2 | |||
| Autofocus | Integrated WDI Autofocus Sensor | Model and Wavelength options available | ||
| Illumination | Integrated WDI High Powered LED | Colour and Intensity options available | ||
| Cameras/Sensor Support** | Type | Area Scan or Line Scan TDI Sensor | ||
| Maximum Image Size | 28mm Diagonal | |||
| Mount | C-Mount or F-Mount (other options available) | |||
| Electrical Requirements | 10°C ~ 30°C | 24V Nominal | ||
| Operating Temperature | 10°C ~ 30°C | Ambient | ||
| Operating Humidity | < 70% | Non Condensing | ||
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